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低温封孔流体充填ディスプレイ装置を製造するための方法
专利权人:
スナップトラック・インコーポレーテッド
发明人:
ユージン・イー・ファイク,ジョイス・エイチ・ウー,ジャスパー・ロデウィック・ステイン,ジグネシュ・ガンディ
申请号:
JP20150041154
公开号:
JP6069386(B2)
申请日:
2015.03.03
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
This methods and devices described herein relate to displays and methods of manufacturing cold seal fluid-filled displays, including MEMS. The fluid substantially surrounds the moving components of the MEMS display to reduce the effects of stiction and to improve the optical and electromechanical performance of the display. The invention relates to a method for sealing a MEMS display at a lower temperature such that a vapor bubble does not formforms only at temperatures about 15° C. to about 20° C. below the seal temperature. In some embodiments, the MEMS display apparatus includes a first substrate, a second substrate separated from the first substrate by a gap and supporting an array of light modulators, a fluid substantially filling the gap, a plurality of spacers within the gap, and a sealing material joining the first substrate to the second substrate.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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