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Scattering plate, grinding wheel, and grinding device
专利权人:
SUMCO TECHXIV CORPORATION
发明人:
Nishimura Yoshinobu
申请号:
US201414902738
公开号:
US9975217(B2)
申请日:
2014.04.25
申请国别(地区):
美国
年份:
2018
代理人:
Greenblum & Bernstein, P.L.C.
摘要:
A diffusion plate includes a plate member facing an opening end of a supply pipe with a thickness direction thereof substantially parallel with a supply direction of a supply fluid. The plate member is rotatable around a rotation axis substantially parallel with the thickness direction and has a diffusion hole, penetrating in the thickness direction at a position other than a rotation center of the plate member. The diffusion hole has a wall surface defined at a rear side in a rotation direction and has a first wall surface end defined in a facing surface facing the supply pipe, at a rearmost in the rotation direction and a second wall surface end defined in a non-facing surface at a rearmost in the rotation direction. The wall surface is inclined with the first wall surface end being at a front side of the second wall surface end in the rotation direction.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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