Tomasz Bajraszewski,Hirofumi Yoshida,Marek Różański,Maciej Szkulmowski
申请号:
US14797361
公开号:
US09310187B2
申请日:
2015.07.13
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An image capturing apparatus includes a dividing unit configured to divide light from a light source into reference light and measurement light a first dichroic mirror arranged in a measurement optical path for guiding the measurement light to an object to be examined a second dichroic mirror arranged in a reference optical path for guiding the reference light to a reference object and a light receiving unit configured to receive interference light between the measurement light passing through the first dichroic mirror and the reference light passing through the second dichroic mirror.