A medical fluid delivery device includes (i) a process fluid body including first and second sides defining a first process fluid inlet valve seat and a first process fluid outlet valve seat and a second process fluid inlet valve seat and a second process fluid outlet valve seat； (ii) a first motive fluid plate defining a first aligned motive fluid inlet valve actuation area and a first aligned motive fluid outlet valve actuation area； (iii) a second motive fluid plate defining a second aligned motive fluid inlet valve actuation area and a second aligned motive fluid outlet valve actuation area； (iv) a first inlet valve diaphragm disposed between the first motive fluid inlet valve actuation area and the first process fluid inlet valve seat； and (v) a first outlet valve diaphragm disposed between the first motive fluid outlet valve actuation area and the first process fluid outlet valve seat.
