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Cell and channel of ultrasonic transducer, and ultrasonic transducer including the same
专利权人:
Dong-kyun Kim
发明人:
Dong-kyun Kim,Hyung-jae Shin,Seok-whan Chung,Byung-gil Jeong
申请号:
US13168473
公开号:
US08727994B2
申请日:
2011.06.24
申请国别(地区):
US
年份:
2014
代理人:
摘要:
A cell of an ultrasonic transducer is provided. The cell includes a substrate a supporting portion disposed on the substrate a thin film spaced apart from the substrate and the supporting portion and a connection portion which connects the supporting portion and the thin film. The connection portion may include a deformation portion that is elastically deformable. A channel of the ultrasonic transducer includes a plurality of cells arranged in an array. The ultrasonic transducer includes a plurality of channels arranged in an array.
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