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Ultrasonic transducer, ultrasonic probe, and ultrasonic examination device
专利权人:
发明人:
Tomoaki Nakamura,Hironori Suzuki,Jiro Tsuruno
申请号:
US14994461
公开号:
US09561527B2
申请日:
2016.01.13
申请国别(地区):
US
年份:
2017
代理人:
摘要:
An ultrasonic transducer includes a substrate, a supporting film disposed on the substrate, and a piezoelectric element disposed on the supporting film. The substrate includes an opening. The piezoelectric element is disposed on an area that overlaps the opening in a plan view in a thickness direction of the substrate. A thickness of the supporting film at an area that overlaps the piezoelectric element in a plan view of the supporting film is smaller than a thickness of the supporting film at a different area different from the area that overlaps the piezoelectric element.
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