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Ultrasonic device and electronic equipment
专利权人:
セイコーエプソン株式会社
发明人:
清瀬 摂内
申请号:
JP2015150079
公开号:
JP6610058B2
申请日:
2015.07.29
申请国别(地区):
JP
年份:
2019
代理人:
摘要:
An ultrasonic device includes an element substrate provided with an ultrasonic transducer array in which a plurality of ultrasonic transducers are arranged in an array, a sealing plate (array counter plate) that is bonded to the element substrate and covers at least the ultrasonic transducer array, and a support substrate that supports at least one of the element substrate and the sealing plate, and the support substrate has a through hole (insertion section) into which at least part of the sealing plate is inserted.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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