機械電気変換素子と機械電気変換装置および機械電気変換装置の作製方法

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专利权人:

キヤノン株式会社

发明人:

江崎 隆博,張 建六,添田 康宏,玉森 研爾

申请号：

JP2009029954

公开号：

JP5376982B2

申请日:

2009.02.12

申请国别(地区):

JP

年份:

2013

代理人:

摘要：

An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/