This invention, although increasing the generation tonnage of active genus, has designated that you hold down the yield of ozone as purpose, electrode 21 of the pair which provides at least on the one hand dielectric film 21of a the opposed face and 22a, 22 and aforementioned electrode between 21 and 22 impressing impulse voltage, the plasma the voltage impression means 4 which it discharges and, being respectively provided in the place where each electrode 21 and 22 corresponds, in order to penetrate completely as the whole, when it possesses with fluid circulation hole 21b and 22b which it forms, the fluid passes this fluid circulation hole 21b and 22b, touching the aforementioned plasma, the ionOr as the radical is generated, aforementioned voltage impression means 4, aforementioned electrode peak value or pulse duration of the impulse voltage which is impressed between 21 and 22 or change the both in the plasma generator 100 which is formed.本発明は、活性種の生成量を増やしながらも、オゾンの発生量を抑えることを目的としており、対向面の少なくとも一方に誘電体膜21a、22aを設けた一対の電極21、22と、前記電極21、22間にパルス電圧を印加してプラズマ放電させる電圧印加手段4と、各電極21、22の対応する箇所にそれぞれ設けられて全体として貫通するように構成した流体流通孔21b、22bとを具備し、この流体流通孔21b、22bを流体が通過するときに前記プラズマと触れてイオン又はラジカルが発生するように構成したプラズマ発生装置100において、前記電圧印加手段4が、前記電極21、22間に印加するパルス電圧のピーク値又はパルス幅或いはその両方を変化させる。
