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PRESSURE SENSOR
专利权人:
MEAS Switzerland S.à.r.l.
发明人:
Thomas Arnold,Philippe Goguillot,Predrag Drljaca
申请号:
US15373294
公开号:
US20180160922A1
申请日:
2016.12.08
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A pressure sensor including a substrate having a first housing defining a gas-filled interior cavity arranged thereon. An elastic sealing element is attached to a free end of the first housing and generally covers an open end of the interior cavity for sealing the interior cavity with respect to an external environment. A portion of the elastic sealing element is configured to be moveable in response to a pressure acting thereon. A semiconductor die is arranged on the substrate and defines a pressure sensing diaphragm exposed to the gas occupying the interior cavity.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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