Anthony Herbert,Justyna Jaroszynska-Wolinska,Liam ONeill
申请号：
US13257072
公开号：
US20120009231A1
申请日:
2010.03.18
申请国别(地区):
US
年份:
2012
代理人:
摘要：
A method for deposition of functional coatings comprises igniting a non-thermal equilibrium plasma within an ambient pressure plasma chamber having a gas supply inlet and a plasma outlet and providing a substrate to be coated adjacent to the plasma outlet. A gas phase pre-cursor monomer is provided to the plasma chamber through the gas inlet. A specific energy is coupled into the plasma during the flow of the pre-cursor through the chamber sufficient to disassociate at least the weakest intra-molecular bond required to allow polymerisation of the pre-cursor when deposited on a surface of the substrate adjacent the plasma outlet, the coupled specific energy not exceeding a specific energy required break intra-molecular bonds required for the functionality of the monomer molecule.
