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ACTUATOR AND VARIABLE SHAPE MIRROR USING ACTUATOR
专利权人:
发明人:
Kenji Tamamori
申请号:
US14980883
公开号:
US20160216508A1
申请日:
2015.12.28
申请国别(地区):
US
年份:
2016
代理人:
摘要:
Provided is an actuator having a structure with which stress concentration on an elastic member of the actuator can be reduced in a manufacturing process thereof and breakage of the elastic member can be inhibited. The actuator includes a movable member, an elastic member configured to connect the movable member and a supporting member to each other, and an electrode pair having a comb electrode structure for displacing the movable member in a direction perpendicular to a reflective surface in which all movable comb electrodes extending from the movable member are substantially in parallel with one another, and a portion of the elastic member, which is located at a beginning of extension from the movable member, is substantially in parallel with the movable comb electrodes.
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