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Particle beam transport apparatus
专利权人:
发明人:
Michel Abs,Szymon Zaremba,Willem Kleeven
申请号:
US14594852
公开号:
US09818573B2
申请日:
2015.01.12
申请国别(地区):
US
年份:
2017
代理人:
摘要:
The present invention is related to an apparatus for transporting a charged particle beam. The apparatus may include means for scanning the charged particle beam on a target, a dipole magnet arranged upstream of the means for scanning, at least three quadrupole lenses arranged between the dipole magnet and the means for scanning and means for adjusting the field strength of said at least three quadrupole lenses in function of the scanning angle of the charged particle beam. The apparatus can be made at least single achromatic.
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