PURPOSE: A door packing structure for a chamber is provided to precisely maintain airtightness for a long time because a packing unit by which an accommodation space part of a chamber is closed in case of closing a door is arranged in the door and part of the packing unit is compressed to the surface of the chamber by supplied pressure. CONSTITUTION: A door packing structure for a chamber comprises a chamber, a door, a packing unit(300), and a pressure supply part(400). The door opens and closes an accommodation space part of the chamber by a clamp. The packing unit is attached to the surface of the chamber while moving by supplied pressure so that between the chamber and the door can be sealed. The pressure supply part supplies pressure to the packing unit. The packing unit comprises a packing block(310) and a packing(320). The packing block is arranged along the inner edge of the door reaching with the chamber. The packing block has a pressure chamber opened to one side. Part of the packing is projected to the outside through the opened part of the pressure chamber by the pressure supplied from the pressure supply part. The packing is attached to the surface of the chamber by the supplied pressure in a state where the door is closed to seal the accommodation space part. Between the door and the chamber is sealed.본 발명은 챔버의 도어 밀폐구조에 관한 것으로, 더욱 상세하게는 내부에 수납공간부을 갖는 챔버, 클램프에 의해 상기 수납공간부를 개폐시키도록 챔버에 구비된 도어, 상기 챔버와 닿는 도어의 가장자리를 따라 구비되며, 공급되는 압력에 의해 이동되어 챔버의 면과 밀착됨에 따라 상기 챔버와 도어 사이를 밀폐시키는 밀폐수단, 및 상기 밀폐수단에 압력을 공급하는 압력공급부를 포함하여 이루어진다.상기와 같은 본 발명에 의하면, 도어의 폐쇄에 의해 챔버의 수납공간부가 밀폐되기 위한 패킹수단이 도어에 구비되고, 공급되는 압력에 의해 패킹수단의 일부가 챔버의 면에 압착되어 기밀상태를 장기간 정밀하게 유지시킬 수 있다.
