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波面収差補正装置
专利权人:
株式会社トプコン
发明人:
齋藤 紀子,小林 亮夫,川島 浩幸
申请号:
JP2007065523
公开号:
JP4920461B2
申请日:
2007.03.14
申请国别(地区):
JP
年份:
2012
代理人:
摘要:
A wavefront aberration compensating apparatus includes: a deformable mirror which compensates a wavefront aberration of a light flux entered, the deformable mirror including a plurality of electrodes, and a thin-film mirror which changes a configuration thereof in accordance with a voltage value applied to each of the electrodes an optical system provided with the deformable mirror, and including an object subjected to aberration compensation a wavefront sensor which receives the light flux traveled through the object and the deformable mirror, and which measures the wavefront aberration of the light flux and a controller configured to calculate the voltage value applied to each of the electrodes, on the basis of differences, from a signal outputted from the wavefront sensor, between application points on the thin-film mirror and target points both corresponding to the electrodes, respectively, and to repeat compensation of the configuration of the thin-film mirror of the deformable mirror on the basis of the calculated voltage value, such that the wavefront aberration of the light flux measured by the wavefront sensor is suppressed.
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