PROBLEM TO BE SOLVED: To provide a mask unit manufacturing method and a mask unit manufacturing device that realize easy manufacturing of a mask unit conforming to a three-dimensional shape of a face part, and to provide the mask unit.SOLUTION: A mask unit manufacturing device includes: a three-dimensional measurement unit (30) that measures a three-dimensional shape of a face part and then acquires three-dimensional shape measurement information (22a) a custom component shape generation unit (24) that, on the basis of the three-dimensional shape measurement information (22a) and a mask opening shape information (22c) for a mother mask (11) as a base material, generates shape information for a custom component (12A) of which both ends are respectively formed into an opening cross-sectional shape along a concavo-convex shape of the face part and into an opening cross-sectional shape along a mask opening shape of the mother mask (11) a custom component forming unit (25) that manufactures the custom component (12A) on the basis of the shape information for the custom component (12A) and a mask assembling unit (26) that manufactures a mask unit by assembling the mother mask (11) and the custom component (12A).COPYRIGHT: (C)2015,JPO&INPIT【課題】顔部の3次元形状に合ったマスクユニットを容易に製造することができるマスクユニット製造方法、マスクユニット製造装置及びマスクユニットを提供する。【解決手段】顔部の3次元形状を計測して3次元形状計測情報(22a)を取得する3次元計測部(30)と、3次元形状計測情報(22a)と基材となるマザーマスク(11)のマスク開口形状情報(22c)とに基づいて顔部の凹凸形状に沿う開口断面の形状及び該マザーマスク(11)のマスク開口形状に沿う開口断面の形状を両端に有するカスタム部品(12A)の形状情報を生成するカスタム部品形状生成部(24)と、カスタム部品(12A)の形状情報に基づいてカスタム部品(12A)を製造するカスタム部品造形部(25)と、マザーマスク(11)とカスタム部品(12A)とを組み合わせてマスクユニットを製造するマスク組み立て部(26)とを含む。【選択図】図1