PROBLEM TO BE SOLVED: To provide a sterilization method which allows a sterilization gas to be prepared from ambient air, the time required for supplying the sterilization gas to a processing part to be shortened, the concentration increase gradient of the sterilization gas to be steepened at the processing part, and the period for substantially commencing sterilization prior to the arrival at the sterilization concentration to be shortened, so that the time required for the successive steps (one cycle) ranging from the preparation to completion of sterilization can be shortened.SOLUTION: The sterilization method includes the steps of: supplying a raw material gas into a storage space in a supply part preparing a storage gas which includes NO2 by plasma irradiation preparing a sterilization gas by injecting a dilution gas with pressure into the storage space in the supply part so as to be mixed with the storage gas and sterilizing an object to be processed by supplying the sterilization gas stored in the storage space to a processing space.COPYRIGHT: (C)2014,JPO&INPIT【課題】外気等から滅菌ガスを調製でき、処理部への滅菌ガスの供給に要する時間を短縮でき、処理部における滅菌ガスの濃度上昇勾配を急にすることができ、滅菌濃度に至る前に実質的に滅菌が開始される期間を短くして、滅菌の準備から完了までの一連の工程(1サイクル)に要する時間を短縮することのできる滅菌方法を提供する。【解決手段】供給部の蓄積空間に原料ガスを供給する工程と、プラズマを照射してNO2を含む蓄積ガスを調製する工程と、供給部の蓄積空間に希釈用ガスを圧入し、蓄積ガスとを混合して滅菌ガスを調製する工程と、処理空間に蓄積空間に蓄積された滅菌ガスを供給して被処理物を滅菌する工程とを含む滅菌方法。【選択図】図6
