PROBLEM TO BE SOLVED: To provide a method that allows masks to be more stably moved, in a film forming technology for superposing a plurality of masks on a substrate.SOLUTION: A method for manufacturing a member having a film on a surface thereof includes the steps of: disposing a first mask having openings on a substrate and disposing a second mask having openings on the first mask; growing a film on the surface of the substrate exposed in the openings of the first and second masks; and moving the first and second masks from the substrate after the growth of the film. The second mask has through holes. In the moving step, the first and second masks are moved by adsorbing the first mask through the through holes.
