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Aberration correcting method and aberration correcting apparatus
专利权人:
发明人:
Koji Nozato,Kohei Takeno
申请号:
US14133364
公开号:
US09277858B2
申请日:
2013.12.18
申请国别(地区):
US
年份:
2016
代理人:
摘要:
Aberration is measured as phase information at each of a plurality of aberration measurement points, and at the time of correcting the aberration with correction pixels of an aberration correction unit of which the number is greater than the number of the plurality of aberration measurement points, correction pixels corresponding to each aberration measurement point are driven based on the phase information. Regarding correction pixels not positionally corresponding to the aberration measurement points, the aberration correction unit is driven based on phase information in the vicinity of this correction pixel.
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