HSIEH, JANG HSING,谢章兴,謝章興,CHANG, SHU CHIEN,张淑茜,張淑茜,HUANG, SHI WEI,黄士玮,黃士瑋
申请号：
TW108130848
公开号：
TWI694748B
申请日:
2019.08.28
申请国别(地区):
TW
年份:
2020
代理人:
摘要：
An electrode component for generating large area atmosphere pressure plasma is provided. The electrode component comprises a first transparent insulation substrate, a first transparent electrode pattern, a second transparent electrode pattern, and a second transparent insulation substrate. The first transparent insulation substrate has a first thickness. The first transparent electrode pattern and the second transparent electrode pattern are formed on an upper surface of the first transparent insulation substrate and has a gap therebetween. The second transparent insulation substrate has a second thickness and covers the first transparent electrode pattern and the second transparent electrode pattern. The second thickness is smaller than the first thickness so as to generate atmospheric pressure plasma above the second transparent insulation substrate.一種用於產生大面積電漿之電極元件。此電極元件包括一第一透明絕緣基板、一第一透明電極圖案、一第二透明電極圖案、與一第二透明絕緣基板。第一透明絕緣基板具有一第一厚度。第一透明電極圖案與第二透明電極圖案係形成於第一透明絕緣基板之一上表面，且第一透明電極圖案與第二透明電極圖案間具有一間隙。第二透明絕緣基板具有一第二厚度，且覆蓋第一透明電極圖案與第二透明電極圖案。其中，第一厚度大於第二厚度，以產生大面積電漿於第二透明絕緣基板上方。
