Micro-fabricated acoustic attenuation devices are described. One such device includes 1) a substrate, 2) a movable diaphragm supported by springs that anchors to the substrate, and 3) a stationary proliferated backplane which is separated by an air gap, whereby sound pressure causes the movable diaphragm to vibrate and when the sound exceeds threshold, the movable diaphragm deflects and presses against the proliferated backplane restricting further movement thus attenuates incoming sound.Another device includes 1) a substrate, 2) a movable diaphragm wherein the diaphragm has at least one hole on it, and 3) a stationary proliferated backplane which is separated by an air gap, whereby sound pressure causes the movable diaphragm to vibrate and when the sound exceeds threshold, the movable diaphragm deflects and presses against the proliferated backplane restricting further movement thus attenuates incoming sound. Methods of producing the micro-fabricated acoustic attenuation device are also described.
