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Chemical solution preparation system, cleaning device, cleaning device system
专利权人:
日科ミクロン株式会社;株式会社安川電機
发明人:
村上 宏彰,野村 正行,田坂 茂二,梅野 真,関口 光重,村田 和隆
申请号:
JP2016534513
公开号:
JP6314229B2
申请日:
2015.07.17
申请国别(地区):
JP
年份:
2018
代理人:
摘要:
[Problem] To provide a chemical solution preparation system and a cleaning device which are capable of increasing safety. [Solution] A robot system (1) has a robot (100) that prepares a chemical solution and injects the chemical solution into a container and a cleaning device (700) that cleans, using cleaning liquid, a surface of the container (716) into which the chemical solution has been injected by the robot (100). The cleaning device (700) has a lid unit (702) an opening (703) of which is closed or opened by being attached to or detached from a cleaning chamber (701), and the lid unit (702) is provided with a hook member (708) for hanging the container (716).
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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