Dennis L. Deavenport;Taeho Ko;Nam Hung Tran;Nada El-Zein
发明人:
Nam Hung Tran,Dennis L. Deavenport,Taeho Ko,Nada El-Zein
申请号：
US11579889
公开号：
US08170404B2
申请日:
2005.05.17
申请国别(地区):
US
年份:
2012
代理人:
摘要：
A bubbler chamber assembly comprising one chamber or two or more chambers connected in series, all chambers being in substantially vertical orientation. A solid or liquid source of the compound is contained in the chamber or chambers. The ratio between the length of the chamber or combined length of chambers connected in series with respect to the direction of flow of the carrier gas through the chamber or chambers and the average diameter equivalent of the cross section of the chamber or chambers with respect to the direction of flow of the carrier gas through the chamber or chambers is not less than about 6:1.
