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Method of manufacturing an ultrasonic transducer electrode assembly
专利权人:
发明人:
Cheryl Rice,Dongjuan Chris Xi
申请号:
US14106897
公开号:
US09312470B2
申请日:
2013.12.16
申请国别(地区):
US
年份:
2016
代理人:
摘要:
A method of fabricating an ultrasound transducer includes providing a substrate having a first side and a second side opposite the first side. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
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