Sharp tip carbon nanotube microneedle devices and their fabrication

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专利权人:

发明人:

Adrianus I. Aria,Bradley Lyon,Morteza Gharib

申请号：

US13715604

公开号：

US08764681B2

申请日:

2012.12.14

申请国别(地区):

US

年份:

2014

代理人:

摘要：

Carbon nanotube needles and needle arrays are described in which the precursor pillars are etched by oxygen plasma treatment to provide tapered and/or sharp-tip needles. Processes, products by process, and devices incorporating the sharp-tip needles are further described.

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