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顕微ラマン分光装置および顕微ラマン分光システム
专利权人:
株式会社日立ハイテクマニファクチャ&サービス
发明人:
佐田 太郎,小暮 誠,新堀 哲也
申请号:
JP20170169124
公开号:
JP6410902(B2)
申请日:
2017.09.04
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a microscopic Raman spectrometer and a Raman microspectroscopic system which can perform position detection of a minute sample equal to or smaller than the wavelength of Raman exciting light and Raman measurement.SOLUTION: A microscopic Raman optical system 100 includes: an oblique irradiation optical system 130 irradiating a minute sample 10 with a laser beam for detecting a position of the minute sample 10 on a principal surface of a semiconductor wafer; and a vertical irradiation optical system irradiating the minute sample 10 with a laser beam for exciting Raman scattered light. The laser beam for detecting a position of the minute sample 10 is emitted to the minute sample 10 from an oblique direction with respect to the principal surface of the semiconductor wafer, and the laser beam for exciting the Raman scattered light is emitted to the minute sample 10 from an orthogonal direction with respect to the principal surface of the semiconductor wafer. The position of the mi
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