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Processing apparatus and article manufacturing method using same
专利权人:
发明人:
Daisuke Iwase,Nobushige Korenaga
申请号:
US14045880
公开号:
US09310688B2
申请日:
2013.10.04
申请国别(地区):
US
年份:
2016
代理人:
摘要:
A processing apparatus configured to conduct a prescribed processing on an object to be processed in a specific environment, the processing apparatus comprising: a chamber configured to have an aperture and an interior accommodated to a specific environment a mechanism of which at least a portion is contained within the chamber interior, while a remaining portion passes through the aperture without contacting the chamber at least one support member configured to support the mechanism a sealing member that configures a boundary of the specific environment and an atmospheric environment by connecting one end to the aperture and connecting the other end to the support member and a rotary member configured to allow relative rotation around a vertical axis between the support member and a structure that supports the support member.
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