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Piezoelectric device and probe, electronic apparatus and ultrasonic imaging apparatus
专利权人:
セイコーエプソン株式会社
发明人:
宮澤 弘,一色 鉄也,伊藤 浩,山田 昌佳,鶴野 次郎,中村 友亮
申请号:
JP2015109530
公开号:
JP6606866B2
申请日:
2015.05.29
申请国别(地区):
JP
年份:
2019
代理人:
摘要:
A piezoelectric device (57) includes: an elastic layer (58) that forms an insulating surface region at least partially and has an amorphous structure or random orientation at least in the surface region; a piezoelectric body (63) that is provided on the elastic layer (58), has a first surface in contact with the elastic layer (58) and a second surface on an opposite side to the first surface, and is (100) preferentially oriented in an orientation region corresponding to the surface region in a plan view; a first electrode (61) provided on the second surface of the piezoelectric body (63); and a second electrode (62) that is provided on the second surface of the piezoelectric body (63) . A gap (64) is formed between the first (61) and second electrodes (62) corresponding to the orientation region in the plan view.
来源网站:
中国工程科技知识中心
来源网址:
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