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PHOTOSENSITIVE RESIN COMPOSITION AND CURED FILM PREPARED THEREFROM
专利权人:
Rohm and Haas Electronic Materials Korea Ltd.
发明人:
Na Jong-Ho,Huh Geun,Kwon Jin,Yang Jong Han
申请号:
US201615769945
公开号:
US2018314153(A1)
申请日:
2016.09.22
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
Disclosed herein are a photosensitive resin composition and a cured film prepared therefrom. The photosensitive resin composition introduces a siloxane polymer containing a fluorine atom which has strong water-repellency into a composition including a common siloxane polymer and an epoxy compound, and fluorine groups may be present in the whole region of the cured film so that the water-repellency due to a fluorine component may be maintained even after removing the surface of the cured film is removed via a dry etching process. As a result, the resistance (chemical resistance) to chemicals used in a post-processing can be maximizes to provide a cured film having excellent stability.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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