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ULTRASONIC TRANSDUCER ELEMENT CHIP, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE
专利权人:
发明人:
NAKAMURA, TOMOAKI,中村友亮,中村友亮,TSURUNO, JIRO,鹤野次郎,鶴野次郎,KIYOSE, KANECHIKA,清濑摄内,清瀨攝內
申请号:
TW102110756
公开号:
TWI620601B
申请日:
2013.03.26
申请国别(地区):
TW
年份:
2018
代理人:
摘要:
An ultrasonic transducer element chip includes a substrate, a plurality of ultrasonic transducer elements, a reinforcing member and a ventilation passage. The substrate defines a plurality of openings arranged in an array pattern. The ultrasonic transducer elements are respectively disposed at the openings on a first surface of the substrate. The reinforcing member is fixed on a second surface of the substrate opposite to the first surface of the substrate to reinforce the substrate. Through the ventilation passage, internal spaces of the openings and an external space of the substrate are in communication with each other.本發明之超音波轉換器元件晶片之特徵在於包含:基板,其開口配置成陣列狀;超音波轉換器元件,其於上述基板之第1面設置於各個上述開口;加強構件,其固定於上述基板之與上述第1面相反側之上述基板之第2面而加強上述基板;及通氣路徑,其將上述開口之內部空間及上述基板之外部空間相互連通。17‧‧‧元件晶片21‧‧‧基板23‧‧‧元件24‧‧‧下部電極25‧‧‧上部電極26‧‧‧壓電體膜37‧‧‧第1軟性印刷基板41‧‧‧第2軟性印刷基板43‧‧‧振動膜44‧‧‧基體45‧‧‧開口46‧‧‧可撓膜47‧‧‧氧化矽層48‧‧‧氧化鋯層49‧‧‧保護膜51‧‧‧間隔壁52‧‧‧加強板53‧‧‧凹槽54‧‧‧複數個平面
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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