SRINIVASAN, VIVEK,FUJIMOTO, JAMES,KO, TONY,WOTJKOWSKI, MACIEJ,HUBER, ROBERT
申请号：
CA2595324
公开号：
CA2595324C
申请日:
2006.01.20
申请国别(地区):
CA
年份:
2015
代理人:
摘要：
In one aspect, the invention relates to a method of acquiring opticalcoherence tomographic data from a sample. The method includes the steps ofscanning a first location on the sample to obtain a first set of opticalcoherence tomographic data, scanning a second location on the sample to obtaina second set of optical coherence tomographic data, and defining a fiducialposition relative to a location on the sample using one of the two sets ofoptical coherence tomographic data. In one embodiment, the first set ofoptical coherence tomographic data is survey data. However, in anotherembodiment the first set of optical coherence tomographic data is samplemeasurement data.
