Clean rooms having dilute hydrogen peroxide (DHP) gas and methods of use thereof

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专利权人:

Synexis LLC

发明人:

LEE, James D.,BOSMA, Douglas J.

申请号：

AU2020213371

公开号：

AU2020213371A1

申请日:

2020.08.07

申请国别(地区):

AU

年份:

2020

代理人:

摘要：

#$%^&*AU2020213371A120200827.pdf#####ABSTRACT Provided are improved clean rooms having dilute hydrogen peroxide (DHP) gas that provides for antiseptic conditions. Also provided are DHP gas containing clean rooms that have reduced levels of volatile organic compounds (VOCs) and methods for preparing clean rooms having DHP gas.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/