The Board of Trustees of the University of Illinois
发明人:
Jean Paul ALLAIN,Zachariah KOYN,Brandon J. HOLYBEE
申请号：
US16500574
公开号：
US20200197566A1
申请日:
2018.04.06
申请国别(地区):
US
年份:
2020
代理人:
摘要：
Provided herein are systems and methods for the controlled surface modification of a material substrate, including, for example, generation of nanostructures, crystallographic or morphologic alterations and the removal of defects, changes in chemical composition and bond structure and the creation of thermodynamic metastable states. The provided systems and methods utilize one or more directed energetic particle beams with independently controlled parameters (e.g. incident angle, fluence, flux, energy, species, etc.) to precisely and efficiently generate enhanced surface properties beyond those of conventional plasma kinetic roughening.
