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Laser amplifier, laser apparatus, and extreme ultraviolet light generating system
专利权人:
发明人:
Takashi Suganuma,Hideo Hoshino
申请号:
US15040588
公开号:
US09685756B2
申请日:
2016.02.10
申请国别(地区):
US
年份:
2017
代理人:
摘要:
There may be provided a laser amplifier including: a chamber containing a laser medium a first window provided on the chamber, and configured to allow a laser light beam inputted from outside of the chamber to enter the chamber an excitation unit configured to amplify, by exciting the laser medium, the laser light beam that has entered the chamber a second window provided on the chamber, and configured to allow the laser light beam that has been amplified by the excitation unit to exit from the chamber to the outside a mirror provided on a laser light path between the first window and the second window and a wavelength selection film provided on one or more of the first window, the second window, and the mirror, and configured to suppress propagation of light beams of one or more suppression target wavelengths different from a desired wavelength.
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