PROBLEM TO BE SOLVED: To provide a liquid injection device that has high durability and high injection capability.SOLUTION: The fluid injection device 1 includes: a fluid chamber 80 whose capacity is variable a fluid supply pump 10 for supplying the fluid to the fluid chamber 80 a fluid injection tube 90 communicating with the fluid chamber 80, and for injecting the fluid a liquid storage chamber 30 for storing the liquid 100 to be stored in a sealed manner a microheater 25 for heating the stored liquid 100 and a flexible diaphragm 40 defining between the fluid chamber 80 and the liquid storage chamber 30, and for varying the capacity of the fluid chamber 80 according to thermal expansion/contraction of the stored liquid 100. When the stored liquid 100 is heated by the microheater 25, the stored liquid 100 expands to cause the diaphragm 40 to be deformed to rapidly reduce the capacity of the fluid chamber 80, so that the fluid is injected in a pulse form from the tip of the injection tube 90 as a liquid droplet.COPYRIGHT: (C)2012,JPO&INPIT【課題】耐久性が高く、噴射能力が高い流体噴射装置を実現する。【解決手段】流体噴射装置1は、容積が変更可能な流体室80と、流体室80に流体を供給する流体供給ポンプ10と、流体室80に連通し流体を噴射する噴射管90と、貯留液体100を密閉収容する液体貯留室30と、貯留液体100を加熱するマイクロヒーター25と、流体室80と液体貯留室30との間を区画し、貯留液体100の熱膨張/収縮に応じて流体室80の容積を変更する可撓性を有するダイアフラム40と、を有する。マイクロヒーター25で貯留液体100を加熱すると、貯留液体100が膨張してダイアフラム40を変形させて流体室80の容積を急激に縮小し、流体を噴射管90の先端から液滴としてパルス状に噴射する。【選択図】図2
