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METHOD FOR TEACHING OF SUBSTRATE PROCESSING APPARATUS
专利权人:
发明人:
申请号:
JP19870500836
公开号:
JPS63502160(A)
申请日:
1986.12.17
申请国别(地区):
日本
年份:
1988
代理人:
摘要:
PCT No. PCT/SU86/00132 Sec. 371 Date Jul. 27, 1987 Sec. 102(e) Date Jul. 27, 1989 PCT Filed Dec. 17, 1986 PCT Pub. No. WO87/03777 PCT Pub. Date Jul. 2, 1987.The device comprises a hermetically sealed chamber (1) whose interior space accommodates a perforated band (3) held to a drive drum (2). Part of the chamber (1) is made as a flexible tubing (4) one end of which is connected to the free end of the perforated band (3), and the other end is turned inside out and held perepherally in the chamber (1) to form a hermetically sealed space (11) along therewith. The interior space (11) of the chamber (1) is connected to the working agent and nutrient medium feeding systems (8,9).
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