SUNG, HO KUN,성호근,LEE, JONG GEUN,이종근,LEE, KEUN WOO,이근우,LEE, BYUNG OU,이병오,LEE, HEE KWAN,이희관,LEE, YONG SU,이용수,KIM, SHIN KEUN,김신근,CHOI, JI HYUN,최지현,SUNG, HO KUNKR,LEE, JONG GEUNKR,LEE, KEUN WOOKR,LEE, BYUNG OUKR,LEE, HEE KWANKR,LEE, YONG SUKR,KIM, SHIN KEUNKR,CHOI, JI HYUNKR
申请号：
KR1020140192392
公开号：
KR1016043070000B1
申请日:
2014.12.29
申请国别(地区):
KR
年份:
2016
代理人:
摘要：
The present invention relates to a method of manufacturing a micro-probe and a micro-probe manufactured by the same. In a method of manufacturing a micro-probe including a main body and a waveguide formed on the front of the main body to induce light stimulus, the method of manufacturing a micro-probe with a downward light emitting type light source-coupled waveguide according to the present invention includes: a first step of forming a waveguide-shaped pattern in a partial region on a substrate by an etching process； a second step of forming a core and a clad in the waveguide-shaped pattern region to form a waveguide； a third step of coating a reflector for coupling a light source and the waveguide on a boundary surface of the waveguide and the main body； a fourth step of forming the light source on the top of the reflector such that the light source emits light downwards to the reflector； and a fifth step of forming a pattern for forming a probe on the substrate to separate a probe-shaped pattern. The micro-probe with a downward light emitting type light source-coupled waveguide according to the present invention is manufactured by the method of manufacturing the micro-probe. The micro-probe according to the present invention provides light of the light source to an end portion of the probe through the waveguide to induce light stimulus, and is free from the generation of an electromagnetic field without the configuration of an electrical circuit including the light source on the probe. The method of manufacturing the micro-probe according to the present invention is capable of manufacturing the micro-probe easily, and improving productivity and economic feasibility since design conditions are not complicated by collecting the light source such that the light source on the probe is emitted downward and enabling the reflector to perform direct coupling of the light source to the waveguide.본 발명은 마이크로 탐침의 제조방법 및 그에 의해 제조된 마이크로 탐침에 관한 것으로서, 본체와, 상기 본체의 전면에 도파로가 형성되어,
