An inspection apparatus includes: a first scanning member scanning an object by reciprocating illumination light in a main scanning direction； a second scanning member scanning the object at a constant speed in a sub-scanning direction； a scanning control unit allowing the first and second scanning members to perform 2D scans of the object with the illumination light in first and second fields within a data acquisition area； and a data acquisition unit acquiring data based on the illumination light returned from the first and second fields. The scanning control unit sets the second field by shifting the first field by a predetermined amount in the sub-scanning direction, the predetermined amount determined such that the closer to the scanning center in the main scanning direction within the data acquisition area, the more regular the interval between the first and second fields in the sub-scanning direction.
