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SYSTEME OPTIQUE DE BALAYAGE AVEC SOURCES OPTIQUES MULTIPLES
专利权人:
WAVELIGHT GMBH
发明人:
JEGLORZ, TOBIAS,DONITZKY, CHRISTOF
申请号:
CA2915520
公开号:
CA2915520C
申请日:
2013.09.02
申请国别(地区):
CA
年份:
2017
代理人:
摘要:
In an embodiment, a scanning optical system comprises: firstand second optical sources (22, 32) for providing first and second beams (18,20), respectively, of optical radiation; a deflector device (42) disposed toreceive and deflect the first and second beams, the deflector deviceconfiguredfor a scanning operation on a beam of radiation traversing the deflectordevice; wherein the first beam (18) is incident on the deflector device (42)with a first orientation and the second beam (20) is incident on the deflectordevice (42) with a second orientation that is different from the firstorientation.
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