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Semiconductor device structures including buried digit lines and related methods
专利权人:
Micron Technology, Inc.
发明人:
Surthi Shyam,Mathew Suraj
申请号:
US201213354957
公开号:
US9947666(B2)
申请日:
2012.01.20
申请国别(地区):
美国
年份:
2018
代理人:
TraskBritt
摘要:
Methods of forming semiconductor device structures include forming trenches in an array region and in a buried digit line end region, forming a metal material in the trenches, filling the trenches with a mask material, removing mask material in the trenches to expose a portion of the metal material, and removing the exposed portion of the metal material. A plurality of conductive contacts is formed in direct contact with the metal material in the buried digit line end region. Methods of forming a buried digit line contact include forming conductive contacts physically contacting metal material in trenches in a buried digit line end region. Vertical memory devices and apparatuses include metallic connections disposed between a buried digit line and a conductive contact in a buried digit line end region.
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中国工程科技知识中心
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