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静電容量型電気機械変換装置
专利权人:
キヤノン株式会社
发明人:
香取 篤史,真島 正男
申请号:
JP2010014044
公开号:
JP5550363B2
申请日:
2010.01.26
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
Provided is a transducer in which electrodes in a movable region are less likely to affect the mechanical characteristics of the movable region and in which nonuniform electrical potential distribution of the surface of the electrodes in the movable region is suppressed. The transducer includes first electrodes and second electrodes opposing the first electrodes with gaps interposed between therebetween. The resistance per unit area of the first electrodes differs in a movable region relative to the second electrodes and an unmovable region relative to the second electrodes. The first electrodes in the movable region and the first electrodes in the unmovable region have different thicknesses.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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