IODINE-CONTAINING POLYMERS FOR CHEMICALLY AMPLIFIED RESIST COMPOSITIONS
- 专利权人:
- Rohm and Haas Electronic Materials LLC
- 发明人:
- Aqad Emad,Thackeray James W.,Cameron James F.
- 申请号：
- US201715623892
- 公开号：
- US2018362752(A1)
- 申请日:
- 2017.06.15
- 申请国别(地区):
- 美国
- 年份:
- 2018
- 代理人:
- 摘要：
- A monomer having formula (I):;wherein in formula (I), groups and variables are the same as described in the specification.
- 来源网站：
- 中国工程科技知识中心
