Lee Jung-June,Ahn Jae Yun,Ku Bon-Ki,Sim Jae Hwan,Lim Jae-Bong
申请号：
US201715626872
公开号：
US2018364576(A1)
申请日:
2017.06.19
申请国别(地区):
美国
年份:
2018
代理人:
摘要：
Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise 1) one or more resins and 2) one or more PDQ compounds that are distinct from the 1) one or more resins.
