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Processing apparatus
专利权人:
发明人:
Ryosuke Ito
申请号:
US15671763
公开号:
US10149599B2
申请日:
2017.08.08
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A processing apparatus includes: a light source unit configured to emit partially coherent light having a coherence length that is equal to or more than inverse of a scattering coefficient of a light scattering body and shorter than half of inverse of a reduced scattering coefficient of the light scattering body an illumination unit configured to irradiate an illumination area on a surface of the light scattering body, with the partially coherent light emitted from the light source unit a detection unit configured to detect, in a detection area including the illumination area, a signal of scattered and returned light from the light scattering body and an interference component extracting unit configured to extract an interference component by excluding a noninterference component from the signal of the scattered and returned light detected by the detection unit.
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