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Systems, devices, and methods for calibration of beam profilers
专利权人:
发明人:
Ihor Berezhnyy,Anthony Tang,Henry Price
申请号:
US14808869
公开号:
US09572715B2
申请日:
2015.07.24
申请国别(地区):
US
年份:
2017
代理人:
摘要:
Embodiments generally describe systems, devices, and methods for focusing and calibrating beam profilers. A test object is provided that may include an internal housing rotatable within an external housing. The internal housing may house a light source, a collimator, a filter, and/or a diffuser. A plate may be mounted to the internal housing and may include a plurality of markings. In some embodiments, to focus a beam profiler, the test object may be positioned adjacent the converter plate of a beam profiler. Marker images may be captured and a focus quality may be assessed therefrom. A position of the converter, objective, and/or camera of the beam profiler may be adjusted based on the focus quality. To calibrate, images of the markings in several rotational positions may be captured and used for calibration. The markings may be rotated to several positions by rotating the internal housing relative to the external housing.
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