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プラズマ発生装置
专利权人:
パナソニック株式会社
发明人:
加藤 亮,中原 健吾,島田 和哉,稲垣 純,稲垣 文人
申请号:
JP2008077335
公开号:
JP5593589B2
申请日:
2008.03.25
申请国别(地区):
JP
年份:
2014
代理人:
摘要:

PROBLEM TO BE SOLVED: To provide a plasma generator can enlarge a gap between electrodes and be usable at low DC voltage and generate ultraviolet rays with strong light-emitting intensity at a wide area without needs to give high short-circuit prevention performance to a dielectric and surely obtain a large quantity of ozone.

SOLUTION: Insulating films 6 with pinholes 5 are respectively arranged on a high-voltage electrode plate 2 and a ground electrode plate 3 arranged to face each other while the gap 4 is arranged between both electrode plates, and surface corona discharge is generated by applying different voltages on the respective electrode plates in order to obtain uniform plasma on the whole surfaces of the electrode plates.

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