PROBLEM TO BE SOLVED: To provide a shielding device defining an outline of an irradiation field, an irradiation device, and an irradiation method.SOLUTION: The shielding device is constituted of a first shielding part 10 and a second shielding part 20, and the first shielding part 10 includes: a plurality of first shielding plates 11a a plurality of first moving parts 11b which move positions of end surfaces of the first shielding plates 11a in an extension direction of the first shielding plates 11a a plurality of second shielding plates 12a which have end surfaces facing respective end surfaces of the first shielding plates 11a and a plurality of moving parts 12b which move the positions of respective end surfaces of the second shielding plates 12a in the extension direction of the first shielding plates 11a. Further, the shielding device includes: a shield provided with a plurality of slits 21a of which the width dimension is an integral fraction of a pitch dimension of the first shielding plates 11a and a third moving part 22 which moves the shield in a direction orthogonal to the extension direction of the first shielding plates 11a.COPYRIGHT: (C)2015,JPO&INPIT【課題】照射野の輪郭の精細化を図る遮蔽装置、照射装置、および照射方法を提供する。【解決手段】遮蔽装置は、第1の遮蔽部10と第2の遮蔽部20で構成され、前記第1の遮蔽部10は、複数の第1の遮蔽板11aと、前記第1の遮蔽板11aの端面の位置を前記第1の遮蔽板11aが延びる方向に移動させる複数の第1の移動部11bと、前記第1の遮蔽板11aのそれぞれの端面と対峙する端面を有する複数の第2の遮蔽板12aと、前記第2の遮蔽板12aのそれぞれの端面の位置を前記第1の遮蔽板11aが延びる方向に移動させる複数の第2の移動部12bとを有する。さらに、前記第1の遮蔽板11aのピッチ寸法の整数分の1の幅寸法を有するスリット21aが複数設けられた遮蔽体と、前記第1の遮蔽板11aが延びる方向と直交する方向に前記遮蔽体を移動させる第3の移動部22と、を有する。【選択図】図2
