Luxembourg Institute of Science and Technology (LIST)
发明人:
Damien Lenoble
申请号：
US14370902
公开号：
US09561523B2
申请日:
2013.01.09
申请国别(地区):
US
年份:
2017
代理人:
摘要：
The present invention is directed to a method of forming a polymer coating on a substrate. The method comprising the steps of providing in an evacuated reaction chamber a substrate having a surface to be coated； and providing a first source of polymer forming material and a second source of radicals. According to the invention the first source and the second source are separated from each other and from the reaction chamber, and the polymer forming material as well as the radicals are, at least temporarily, conducted contemporaneously but spatially separated to the substrate's surface, so that a reaction of the polymer forming material with the radicals is avoided before they reach the substrate's surface. Further, the present invention is directed to a device for carrying out the method according to the invention.
