14 ABSTARCT METHOD FOR FABRICATING MICRONEEDLES AND MICRONEEDLE FABRICATED FROM THE SAME THIS INVENTION RELATES TO A METHOD OF FABRICATING MICRONEEDLES USING DRY 5 ETCHING METHODS ON A SILICON BASED MATERIAL AND MORE PARTICULARLY A METHOD OF FABRICATINA HOLLOW OUT-OF-PLANE MICRONEEDLES WHICH ARE ARRANGED IN A SINGLE ROW OF AT LEAST TWO MICRONEEDLES. THE FABRICATION PROCESS COMPRISES OF MULTIPLE STEPS INVOLVING REACTIVE ION ETCHING (RIE) ISOTROPIC AND DEEP REACTIVE ION ETCHING (DRIE) ANISOTROPIC PROCESSES. THE PROCESS INVOLVED ONLY DRY I 0 ETCHING AND THE ISOTROPIC PROCESS STEP PARTICULARLY, INCLUDES PLASMA ETCH. MOST ILLUSTRATIVEFIGURE IS FIG. 3
