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生化学的用途での超低電流測定のためのノイズ遮蔽技術
专利权人:
ジニア・テクノロジーズ・インコーポレーテッドGENIA TECHNOLOGIES INCORPORATED
发明人:
チェン・ロジャー・ジェイ.エイ.
申请号:
JP20140556549
公开号:
JP6141330(B2)
申请日:
2012.12.14
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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